Lift-off Layer Process--> Dow™ Electronic Materials MICROPOSIT™ EC Solvent Edge Bead Remover is an Ethyl Lactate based solvent, which is used to eliminate the photoresist and anti-reflectant edge bead that occurs during typical spin coat wafer processing. Advantages: Toxicologically-safer alternative to the ethylene glycol derived ether acetates Compatible with all MICROPOSIT™ and



Product will not undergo hazardous polymerization. The chemical Remover 1165, is known as a Microposit Remover 1165, a mixture of pure organic solvents specifically formulated to remove all Shipley Microposit and Megaposit Photoresists. Remover 1165 has an extended bath life, which means that it possesses a high bath capacity, a low bath evaporation rate, and a high solvent boiling point. MICROPOSIT REMOVER 1165 is a mixture of pure organic solvents specifically formulated to remove all Dow MICROPOSIT and MEGAPOSIT® PHOTORESISTS. It is particularly recommended for use in applications where the photoresist has seen high temperatures, strong etchants, or other harsh processing conditions.

Microposit remover 1165

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(1992). 2012-10-12 · The question deals with the stripping process done to free silicon wafers from photoresist. I need a very detailed answer. I hope someone from a semiconductor industry can find this question. I have been told that water can remove this Microposit 1165 from wafers but I need to see a comparison between these two compounds ( viscosity, resistivity, polarity; anything that has to do with removing Remover 1165 - Free download as PDF File (.pdf), Text File (.txt) or read online for free. CAS 872-50-4 MICROPOSIT REMOVER 1165 2-pyrrolidinone, 1-methyl-; (n-methyl-2-pyrrolidone) non-hazardous ients msds toxicity property IEN - IEN - Micro/Nano Fabrication Facility - Fill Microposit Remover 1165, Edit online.

Advantages: Toxicologically-safer alternative to the ethylene glycol derived ether acetates Compatible with all MICROPOSIT™ and MF CD-26 is the recommended developer. MICROPOSIT REMOVER 1165.

MATERIAL SAFETY DATA SHEET MICROPOSIT REMOVER 1165 38680 4.00 US US MSDS_US 1. 2. CHEMICAL PRODUCT AND COMPANY IDENTIFICATION Product Code Trade Name Manufacturer/Supplier Address 38680 MICROPOSIT REMOVER 1165 Shipley Company 455 Forest St. Marlborough, Massachusetts 01752

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Warning: Microposit Remover 1165 (Rohm & Haas) is a combination of solvents including N-methyl-2-pyrrolidine. It will cause burns and irritation if it contacts your skin or eyes. Avoid breathing the vapors. Acetone and isopropanol are flammable, volatile solvents. Avoid heat sources and avoid breathing the vapors. 1. Material Requirements:

Microposit remover 1165

This process will leave only metal on. Microposit Remover 1165 from MicroChem (Newton, MA). 12.

Avoid breathing the vapors.
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300nm - Al. 5.

SK-6000 and SR-2000 Solvent Recovery Systems. (1996). Spontaneous Abortions and Stillbirths in Semiconductor Employees. (1996).
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The remaining photoresist is removed by Microposit Remover 1165. If the remover doesn't remove all of the photoresist Kimwipes (Uline, WI, USA) (wetted by 

AZ ® 100 Remover is an amine-solvent mixture, and a ready-to-use standard remover for AZ ® and TI photoresists. In order to improve its performance, AZ ® 100 Remover can be heated to 60-80°C. Since AZ ® 100 Remover is strongly alkaline, aluminium containing substrates might be attacked as well as copper- or GaAs alloys/compounds. MICROPOSIT Remover 1165 is a high-quality Rohm and Haas Electronic Materials product for stripping positive photoresist from sensitive substrates. It requires no intermediate rinse and is fully miscible in water.